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PRODUCT

Optical Module
  • Telecentric Lens
  • Infinity Corrected System
  • Laser Module
  • Optical Module
  • LED Illumination
  • Optical Module

    Semiconductor Probe Wafer의 정상 유무를 Test하는 Probe 설비에 사용되는 광학계이며, Wafer 검사 광학계와 Needle 검사용 광학계 세트로 구성됩니다.

  • Semiconductor Probe
  • Line Scan
  • Microscopy
  • Dual View Module
  • Display Probe

CHUCK SPEC

Model Magnification Illumination WD
(mm)
NA Resolution
Calculation
Resolution
Monitor
D.O.F(um) Download
Chuck Camera 0.9X Coaxial / Ring 19.1 0.04 7.6 15.62 ±0.55
14X Coaxial 10.46 0.33 0.93 1.55 ±4.3

BRIDGE SPEC

Model Magnification Illumination WD
(mm)
NA Resolution
Calculation
Resolution
Monitor
D.O.F(um) Download
Bridge Camera 0.6X Coaxial / Ring 19 0.025 12.5 27.8 ±1300
8.5X Coaxial / Ring 18.8 0.2 1.53 1.95 ±11.7
15.2X Coaxial / Ring 19 0.2 1.53 1.75 ±6.6

Needle Camera SPEC

Model Magnification Illumination WD
(mm)
NA Resolution
Calculation
Resolution
Monitor
D.O.F(um) Download
Needle Camera 1X Coaxial / Ring 15.2 0.05 6.1 22.08 ±400

10X Coaxial 10 0.32 0.96 2.19 ±6.2

Wafer Camera SPEC

Model Magnification Illumination WD
(mm)
NA Resolution
Calculation
Resolution
Monitor
D.O.F(um) Download
Wafer Camera 1X Coaxial 13.67 0.06 5.1 22.08 ±333.3
5X Coaxial 13.67 0.21 1.46 4.36 ±19

Card Camera

Model Magnification Illumination WD
(mm)
NA Resolution
Calculation
Resolution
Monitor
D.O.F(um) Download
Card Camera 0.88X Coaxial / Ring 17 0.04 8.38 10 ±500
13.6X Coaxial 10 0.33 1.01 0.64 ±3.9

Wafer Camera

Model Magnification Illumination WD
(mm)
NA Resolution
Calculation
Resolution
Monitor
D.O.F(um) Download
Wafer Camera 0.55X Coaxial / Ring 6 0.028 11.98 16 ±1140
6.2X Coaxial / Ring 6 0.23 1.45 1.41 ±12.3
16.2X Coaxial / Ring 6 0.23 1.45 0.54 ±4.7