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PRODUCT
Optical Module
Semiconductor Probe Wafer의 정상 유무를 Test하는 Probe 설비에 사용되는 광학계이며, Wafer 검사 광학계와 Needle 검사용 광학계 세트로 구성됩니다.
CHUCK SPEC
Model | Magnification | Illumination | WD (mm) |
NA | Resolution Calculation |
Resolution Monitor |
D.O.F(um) | Download |
Chuck Camera | 0.9X | Coaxial / Ring | 19.1 | 0.04 | 7.6 | 15.62 | ±0.55 | |
14X | Coaxial | 10.46 | 0.33 | 0.93 | 1.55 | ±4.3 |
BRIDGE SPEC
Needle Camera SPEC
Model | Magnification | Illumination | WD (mm) |
NA | Resolution Calculation |
Resolution Monitor |
D.O.F(um) | Download |
Needle Camera | 1X | Coaxial / Ring | 15.2 | 0.05 | 6.1 | 22.08 | ±400 |
|
10X | Coaxial | 10 | 0.32 | 0.96 | 2.19 | ±6.2 |
Wafer Camera SPEC
Model | Magnification | Illumination | WD (mm) |
NA | Resolution Calculation |
Resolution Monitor |
D.O.F(um) | Download |
Wafer Camera | 1X | Coaxial | 13.67 | 0.06 | 5.1 | 22.08 | ±333.3 | |
5X | Coaxial | 13.67 | 0.21 | 1.46 | 4.36 | ±19 |
Card Camera
Model | Magnification | Illumination | WD (mm) |
NA | Resolution Calculation |
Resolution Monitor |
D.O.F(um) | Download |
Card Camera | 0.88X | Coaxial / Ring | 17 | 0.04 | 8.38 | 10 | ±500 | |
13.6X | Coaxial | 10 | 0.33 | 1.01 | 0.64 | ±3.9 |
Wafer Camera